Directed Self-assembly of Block Co-polymers for Nano-manufacturing

The directed self-assembly (DSA) method of patterning for microelectronics uses polymer phase-separation to generate features of less than 20nm, with the positions of self-assembling materials externally guided into the desired pattern. Directed self-assembly of Block Co-polymers for Nano-manufacturing reviews the design, production, applications and future developments needed to facilitate the widescale adoption of this promising technology. Beginning with a solid overview of the physics and chemistry of block copolymer (BCP) materials, Part 1 covers the synthesis of new materials and new processing methods for DSA. Part 2 then goes on to outline the key modelling and characterization principles of DSA, reviewing templates and patterning using topographical and chemically modified surfaces, line edge roughness and dimensional control, x-ray scattering for characterization, and nanoscale driven assembly. Finally, Part 3 discusses application areas and related issues for DSA in nano-manufacturing, including for basic logic circuit design, the inverse DSA problem, design decomposition and the modelling and analysis of large scale, template self-assembly manufacturing techniques. Authoritative outlining of theoretical principles and modeling techniques to give a thorough introdution to the topicDiscusses a broad range of practical applications for directed self-assembly in nano-manufacturing Highlights the importance of this technology to both the present and future of nano-manufacturing by exploring its potential use in a range of fields INDICE: Part 1 Physics and Chemistry of block copolymer (BCP) materials 1 Physics of block copolymers from bulk to thin films 2 RAFT synthesis of block copolymers and their self-assembly properties 3 Thermal and solvent annealing of block copolymers films 4 Field-theoretic simulations and self-consistent field theory (SCFT) simulations for studying block copolymer assembly Part 2 Templates and patterning for directed self-assembly 5 Directed self-oriented self-assembly of block copolymers using topographical surfaces 6 Directed self-oriented self-assembly of block copolymers using chemically modified surfaces 7 Lin Edge Roughness and Dimensional Control in directed self-assembly  8 Soft and hard x-ray scattering to characterize the pattern shape in directed self-assembly of block co-polymers 9 Driven assembly at the nanoscale and its application to nanofabrication Part 3 Application of directed self-assembly in nano-manufacturing 10 Directed self-assembly for basic logic circuit design 11 The inverse directed self-assembly problem 12 Design decomposition in templated directed self-assembly 13 Modeling and analysis of large scale, templated self-assembly manufacturing techniques

• ISBN: 978-0-08-100250-6
• Editorial: Woodhead Publishing
• Encuadernacion: Cartoné
• Páginas: 646
• Fecha Publicación: 03/08/2015
• Nº Volúmenes: 1
• Idioma: Inglés