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The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it. MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing.
- ISBN: 978-1-4614-2736-0
- Editorial: Springer
- Encuadernacion: Rústica
- Fecha Publicación: 02/01/2013
- Nº Volúmenes: 1
- Idioma: Inglés