Microelectronics test structures for CMOS technology and products

Test structures are used to develop and monitor the manufacturing process, product yield and performance of CMOS technology. The structures, when appropriately designed, provide timely feedback during the manufacturing and product evaluation processes, which in turn helps reduce the overall cost. This book covers the fundamentals of test structure designs for silicon CMOS technology, while also describing the basics of electrical measurements and characterizationtechniques for optimal use of the test structures. Often, the task of designing test structures is handed down to engineers with less experience who are given no training or guidelines for executing the design. As a result, many teststructures are improperly designed and may have limited utility, or not work at all. In addition, poorly designed structures that are functional also create more questions than they answer, thus adding confusion to the process ratherthan resolving it. In the last decade, many small companies have sprung up toassist the larger silicon chip manufacturers in improving product yield, and CMOS chip design companies design their own test structures to evaluate the technology, but they have limited exposure to the complexity of the manufacturing process. Microelectronics Test Structures for CMOS Technology and Products fills the need of improving the quality of test structures by providing a concise view of the basics of test structure design and implementation, and how tocarry this knowledge forward towards more complex ideas. The book covers the basics of test structure design for CMOS technology, and is meant to serve as a single-volume guide to engineers involved in the design, test and characterization of test structures. The authors present a disciplined approach and methodology to the subject that is applicable across a wide range of designs and situations, presenting their ideas with specific examples meant to facilitate the implementation of useful and efficient test structures by practitioners ranging from university students to seasoned designers, engineers and technology developers. Provides a comprehensive guide to designing the most effective and lowest-cost microelectronic test structures. Uses specific examples of good design techniques and discusses common errors to avoid in order to guide readers. Presents an integrated approach to multiple parts of the design process, using measurement techniques and statistical analysis combined with physical mapping INDICE: Introduction. Test Structure Basics. Resistors. Capacitors. MOSFETs. Ring Oscillators. High Speed Characterization. Test Structures of SOI Technology. Test Equipment and Measurements. Data Analysis.

• ISBN: 978-1-4419-9376-2
• Editorial: Springer New York
• Encuadernacion: Cartoné
• Páginas: 390
• Fecha Publicación: 12/06/2011
• Nº Volúmenes: 1
• Idioma: Inglés