Updated and revised, this perennial bestseller continues to provide the most complete MEMS and NEMS reference currently available. Discussing a variety of approaches, it offers background and comprehensive coverage on materials, processes, and manufacturing options. Now in its third edition, "Fundamentals of Microfabrication" includes recent developments in design packages, DNA and protein array, and fluidics. It also includes a section on nanotechnology applications and a chapter on nanomachining. This seminal reference also serves as a cogent instructional text, providing both classroom and self-learners with worked-out example problems, as well as reinforcing questions with answers. INDICE: Lithography. Pattern Transfer with Dry Etching Techniques. Patterns Transfer with Additive Techniques. Wet Bulk Micromachining. Surface Micromaching. LIGA and Micromolding. Top-Down Manufacturing Methods Compared-SubstrateChoice. The Emergence of Bottom-Up Manufacturing Methods: Nano-chemistry. Modeling, Packaging Brains and Power. Scaling and Actuators. Miniaturization Applications.
- ISBN: 978-0-8493-3180-0
- Editorial: CRC Press
- Encuadernacion: Cartoné
- Páginas: 2640
- Fecha Publicación: 01/06/2010
- Nº Volúmenes: 3
- Idioma: Inglés