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Material Design of Metal/Oxide Interfaces for Nanoelectronics Applications
Nagata, Takahiro
Oxide materials are good candidates to replace Si devices which are facing performance limits since these materials display unique properties, either due to their composition design and/or doping technique.
The author introduces a means of selecting oxide materials according to their functions and explains metal/oxide interface physics. Material development is the key to matching oxide materials to specific practical applications.
In this book, the investigation and intentional control of metal/oxide interface structure and electrical properties with the data obtained using non-destructive methods such as x-ray photoelectron spectroscopy (XPS) and x-ray reflectometry (XRR) are discussed. Oxide materials should support the development of future functional devices with High-k, ferroelectric, magnetic and optical properties. Optical sensors as an application of metal Schottky contact and metal/oxide resistive random access memory structure are also explained.
- ISBN: 978-4-431-54849-2
- Editorial: Springer
- Encuadernacion: Rústica
- Fecha Publicación: 14/01/2016
- Nº Volúmenes: 1
- Idioma: Inglés